Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films
| Author(s): |
Felipe C. da Silva
Matheus A. Tunes Julio C. Sagás Cláudio G. Schön |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Procedia Structural Integrity, 2018, v. 13 |
| Page(s): | 658-663 |
| DOI: | 10.1016/j.prostr.2018.12.109 |
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10642896 - Published on:
10/01/2022 - Last updated on:
10/01/2022
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