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The effects of annealing and wake-up cycling on the ferroelectricity of zirconium hafnium oxide ultrathin films prepared by remote plasma atomic layer deposition

This publication lists 21 references to other publication(s):

  • About this
    data sheet
  • Reference-ID
    10313660
  • Published on:
    30/06/2019
  • Last updated on:
    26/07/2019
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