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Design and Fabrication of a High-speed Linear Piezoelectric Actuator with Nanometer Resolution Using a Cantilever Transducer

Structurae cannot make the full text of this publication available at this time. The full text can be accessed through the publisher via the DOI: 10.1088/1361-665x/ab1161.
  • About this
    data sheet
  • Reference-ID
    10310874
  • Published on:
    30/06/2019
  • Last updated on:
    30/06/2019
 
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