Compliant electrostatic chuck based on hairy microstructure
| Author(s): |
Shigeki Saito
Fumiaki Soda Radon Dhelika Kunio Takahashi Wataru Takarada Takeshi Kikutani |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, January 2013, n. 1, v. 22 |
| Page(s): | 015019 |
| DOI: | 10.1088/0964-1726/22/1/015019 |
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10216797 - Published on:
04/12/2018 - Last updated on:
04/12/2018
Structurae cooperates with
