Fumiaki Soda
- Compliant electrostatic chuck based on hairy microstructure. In: Smart Materials and Structures, v. 22, n. 1 (January 2013). (2013):
- Addendum: Compliant electrostatic chuck based on hairy microstructure (2013Smart Mater. Struct.22 015019) and Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces (2013Smart Mater. Struct.2. In: Smart Materials and Structures, v. 23, n. 7 (July 2014). (2014):