Addendum: Compliant electrostatic chuck based on hairy microstructure (2013Smart Mater. Struct.22 015019) and Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces (2013Smart Mater. Struct.2
| Author(s): |
Shigeki Saito
Takeshi Kikutani Kunio Takahashi Wataru Takarada Fumiaki Soda Kenji Sawai Radon Dhelika |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, July 2014, n. 7, v. 23 |
| Page(s): | 079401 |
| DOI: | 10.1088/0964-1726/23/7/079401 |
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10225469 - Published on:
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04/12/2018
Structurae cooperates with
