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Surface acoustic wave pressure sensor on ScAlN/3C-SiC/Si layer structure incorporating biomimetic microcantilever: modelling and performance enhancement

Author(s):





Medium: journal article
Language(s): English
Published in: Smart Materials and Structures, , n. 1, v. 30
Page(s): 015021
DOI: 10.1088/1361-665x/abcab1
Structurae cannot make the full text of this publication available at this time. The full text can be accessed through the publisher via the DOI: 10.1088/1361-665x/abcab1.
  • About this
    data sheet
  • Reference-ID
    10506610
  • Published on:
    27/11/2020
  • Last updated on:
    27/11/2020
 
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