Study on contamination control in a minienvironment inside clean room for yield enhancement based on particle concentration measurement and airflow CFD simulation
| Author(s): |
Kwang-Chul Noh
Hyuk-Soon Kim Myung-Do Oh |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Building and Environment, April 2010, n. 4, v. 45 |
| Page(s): | 825-831 |
| DOI: | 10.1016/j.buildenv.2009.09.001 |
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26/11/2019
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