Stress control of piezoelectric ZnO films on silicon substrates
| Author(s): |
A. Cimpoiasu
N. M. van der Pers Th. H. de Keyser A. Venema M. J. Vellekoop |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, December 1996, n. 6, v. 5 |
| Page(s): | 744-750 |
| DOI: | 10.1088/0964-1726/5/6/003 |
- About this
data sheet - Reference-ID
10214515 - Published on:
04/12/2018 - Last updated on:
04/12/2018
Structurae cooperates with
