Stability and microbial toxicity of HfO2 and ZrO2 nanoparticles for photolithography
Author(s): |
Jorge Gonzalez-Estrella
Jim A. Field Christopher K. Ober Reyes Sierra-Alvarez |
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Medium: | journal article |
Language(s): | English |
Published in: | Green Materials, September 2019, n. 3, v. 7 |
Page(s): | 109-117 |
DOI: | 10.1680/jgrma.18.00056 |
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10520834 - Published on:
08/12/2020 - Last updated on:
19/02/2021