Review of modeling electrostatically actuated microelectromechanical systems
| Author(s): |
R. C. Batra
M. Porfiri D. Spinello |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, December 2007, n. 6, v. 16 |
| Page(s): | R23-R31 |
| DOI: | 10.1088/0964-1726/16/6/r01 |
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10223580 - Published on:
04/12/2018 - Last updated on:
04/12/2018
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