Resonant capacitive MEMS acoustic emission transducers
| Author(s): |
D. Ozevin
D. W. Greve I. J. Oppenheim S. P. Pessiki |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, December 2006, n. 6, v. 15 |
| Page(s): | 1863-1871 |
| DOI: | 10.1088/0964-1726/15/6/041 |
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10223318 - Published on:
04/12/2018 - Last updated on:
04/12/2018
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