Reliability-based analysis and design optimization of electrostatically actuated MEMS
Author(s): |
M. Allen
|
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Computers & Structures, May 2004, n. 13-14, v. 82 |
Page(s): | 1007-1020 |
DOI: | 10.1016/s0045-7949(04)00079-3 |
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10281322 - Published on:
05/01/2019 - Last updated on:
05/01/2019