Redundantly piezo-actuated XYθ z compliant mechanism for nano-positioning featuring simple kinematics, bi-directional motion and enlarged workspace
| Author(s): |
Wu-Le Zhu
Zhiwei Zhu Suet To Qiang Liu Bing-Feng Ju Xiaoqin Zhou |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, December 2016, n. 12, v. 25 |
| Page(s): | 125002 |
| DOI: | 10.1088/0964-1726/25/12/125002 |
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10216127 - Published on:
04/12/2018 - Last updated on:
13/12/2018
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