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Redundantly piezo-actuated XYθ z compliant mechanism for nano-positioning featuring simple kinematics, bi-directional motion and enlarged workspace

This publication lists 24 references to other publication(s):

  • About this
    data sheet
  • Reference-ID
    10216127
  • Published on:
    04/12/2018
  • Last updated on:
    13/12/2018
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