Rapid deposition process for zinc oxide film applications in pyroelectric devices
Author(s): |
Chun-Ching Hsiao
Shih-Yuan Yu |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, October 2012, n. 10, v. 21 |
Page(s): | 105012 |
DOI: | 10.1088/0964-1726/21/10/105012 |
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10216917 - Published on:
04/12/2018 - Last updated on:
04/12/2018