Pre-stressed piezoelectric bimorph micro-actuators based on machined 40 µm PZT thick films: batch scale fabrication and integration with MEMS
| Author(s): |
S. A. Wilson
R. P. Jourdain S. Owens |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, August 2010, n. 9, v. 19 |
| Page(s): | 094001 |
| DOI: | 10.1088/0964-1726/19/9/094001 |
- About this
data sheet - Reference-ID
10224271 - Published on:
02/12/2018 - Last updated on:
02/12/2018
Structurae cooperates with
