Power consumption benchmark for a semiconductor cleanroom facility system
| Author(s): |
Shih-Cheng Hu
Jen-Syua Wu David Yih-Liang Chan Rich Tsung-Chi Hsu Jane Car-Cheng Lee |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Energy and Buildings, January 2008, n. 9, v. 40 |
| Page(s): | 1765-1770 |
| DOI: | 10.1016/j.enbuild.2008.03.006 |
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27/10/2020
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