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Performance and improvement of cleanroom environment control system related to cold-heat offset in clean semiconductor fabs

Author(s):



Medium: journal article
Language(s): English
Published in: Energy and Buildings, , v. 224
Page(s): 110294
DOI: 10.1016/j.enbuild.2020.110294
Structurae cannot make the full text of this publication available at this time. The full text can be accessed through the publisher via the DOI: 10.1016/j.enbuild.2020.110294.
  • About this
    data sheet
  • Reference-ID
    10471840
  • Published on:
    27/10/2020
  • Last updated on:
    27/10/2020
 
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