One-step firing for electroded PZT thick films applied to MEMS
| Author(s): |
H. Debéda
P. Clément E. Llobet C. Lucat |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, February 2015, n. 2, v. 24 |
| Page(s): | 025020 |
| DOI: | 10.1088/0964-1726/24/2/025020 |
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10225747 - Published on:
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04/12/2018
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