A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process
| Author(s): |
Kwang-Chul Noh
Myung-Do Oh Seung-Chul Lee |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Building and Environment, November 2005, n. 11, v. 40 |
| Page(s): | 1431-1440 |
| DOI: | 10.1016/j.buildenv.2004.11.016 |
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10392577 - Published on:
26/11/2019 - Last updated on:
26/11/2019
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