Nanofabrication processes for single-ion implantation of silicon quantum computer devices
| Author(s): |
Rita P. McKinnon
Fay E. Stanley Nancy E. Lumpkin Eric Gauja Linda D. Macks Mladen Mitic Victor Chan Katia Peceros Tilo M. Buehler Andrew S. Dzurak Robert G. Clark Changyi Yang David N. Jamieson Steven D. Prawer |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, October 2002, n. 5, v. 11 |
| Page(s): | 735-740 |
| DOI: | 10.1088/0964-1726/11/5/317 |
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10215888 - Published on:
04/12/2018 - Last updated on:
04/12/2018
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