A model for chemically-induced mechanical loading on MEMS
| Author(s): |
Fabien Amiot
|
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Journal of Mechanics of Materials and Structures, November 2007, n. 9, v. 2 |
| Page(s): | 1787-1803 |
| DOI: | 10.2140/jomms.2007.2.1787 |
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10548673 - Published on:
20/01/2021 - Last updated on:
19/02/2021
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