Miniaturized langasite MEMS micro-cantilever beam structured resonator for high temperature gas sensing
Author(s): |
Chen Zhang
Wei Jiang Abhishek Ghosh Guoan Wang Felix Wu Haifeng Zhang |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, 27 March 2020, n. 5, v. 29 |
Page(s): | 055002 |
DOI: | 10.1088/1361-665x/ab78b6 |
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data sheet - Reference-ID
10414242 - Published on:
26/02/2020 - Last updated on:
31/03/2020