MEMS-based microstructures for nanomechanical characterization of thin films
| Author(s): |
A. Boé
A. Safi M. Coulombier D. Fabrègue T. Pardoen J.-P. Raskin |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, November 2009, n. 11, v. 18 |
| Page(s): | 115018 |
| DOI: | 10.1088/0964-1726/18/11/115018 |
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