Magnetic field effects on coating deposition rate and surface morphology coatings using magnetron sputtering
Author(s): |
Yu-Sen Yang
Wesley Huang |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, December 2010, n. 12, v. 19 |
Page(s): | 124003 |
DOI: | 10.1088/0964-1726/19/12/124003 |
- About this
data sheet - Reference-ID
10224353 - Published on:
04/12/2018 - Last updated on:
04/12/2018