Low speed piezoelectric optical microscanner actuated by piezoelectric microcantilevers using LaNiO3buffered Pb(Zr,Ti)O3thin film
Author(s): |
T. Kobayashi
R. Maeda T. Itoh |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, June 2009, n. 6, v. 18 |
Page(s): | 065008 |
DOI: | 10.1088/0964-1726/18/6/065008 |
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10223911 - Published on:
02/12/2018 - Last updated on:
02/12/2018