Lithography performance and environmental compatibility of PFOS-free photoacid generators
| Author(s): |
Wenjie Sun
Youngjin Cho Marie Krysak Christine Y. Ouyang Reyes Sierra-Alvarez Christopher K. Ober |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Green Materials, December 2017, n. 4, v. 5 |
| Page(s): | 173-181 |
| DOI: | 10.1680/jgrma.17.00020 |
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10520871 - Published on:
08/12/2020 - Last updated on:
19/02/2021
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