Integration of SWNT film into MEMS for a micro-thermoelectric device
| Author(s): |
Van Thanh Dau
Dzung Viet Dao Takeo Yamada Bui Thanh Tung Kenji Hata Susumu Sugiyama |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, July 2010, n. 7, v. 19 |
| Page(s): | 075003 |
| DOI: | 10.1088/0964-1726/19/7/075003 |
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10224214 - Published on:
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04/12/2018
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