Susumu Sugiyama
- A 2-DOF convective micro accelerometer with a low thermal stress sensing element. In: Smart Materials and Structures, v. 16, n. 6 (December 2007). (2007):
- Simulation, fabrication and characterization of a three-axis piezoresistive accelerometer. In: Smart Materials and Structures, v. 15, n. 6 (December 2006). (2006):
- Integration of SWNT film into MEMS for a micro-thermoelectric device. In: Smart Materials and Structures, v. 19, n. 7 (July 2010). (2010):
- Microneedle fabrication using the plane pattern to cross-section transfer method. In: Smart Materials and Structures, v. 15, n. 2 (April 2006). (2006):