A 2-DOF convective micro accelerometer with a low thermal stress sensing element
| Author(s): |
Van Thanh Dau
Dzung Viet Dao Susumu Sugiyama |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, December 2007, n. 6, v. 16 |
| Page(s): | 2308-2314 |
| DOI: | 10.1088/0964-1726/16/6/034 |
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10223594 - Published on:
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04/12/2018
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