Influence of ventilation arrangements on particle removal in industrial cleanrooms with various tool coverage
| Author(s): |
Yun-Chun Tung
Shih-Cheng Hu Tengfang Xu Ren-Huei Wang |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Building Simulation, March 2010, n. 1, v. 3 |
| Page(s): | 3-13 |
| DOI: | 10.1007/s12273-010-0301-z |
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10546727 - Published on:
20/01/2021 - Last updated on:
19/02/2021
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