Influence of ventilation arrangements on particle removal in industrial cleanrooms with various tool coverage
Auteur(s): |
Yun-Chun Tung
Shih-Cheng Hu Tengfang Xu Ren-Huei Wang |
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Médium: | article de revue |
Langue(s): | anglais |
Publié dans: | Building Simulation, mars 2010, n. 1, v. 3 |
Page(s): | 3-13 |
DOI: | 10.1007/s12273-010-0301-z |
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10546727 - Publié(e) le:
20.01.2021 - Modifié(e) le:
19.02.2021