Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications
| Author(s): |
Nathan Jackson
Lynette Keeney Alan Mathewson |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, November 2013, n. 11, v. 22 |
| Page(s): | 115033 |
| DOI: | 10.1088/0964-1726/22/11/115033 |
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10225265 - Published on:
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04/12/2018
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