Finite-element modeling of the transient response of MEMS sensors
| Author(s): |
Young-Hun Lim
Vasundara V. Varadan Vijay K. Varadan |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, February 1997, n. 1, v. 6 |
| Page(s): | 53-61 |
| DOI: | 10.1088/0964-1726/6/1/007 |
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10214536 - Published on:
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04/12/2018
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