Fine motion control of a moving stage using a piezoactuator associated with a displacement amplifier
| Author(s): |
S. B. Choi
S. S. Han Y. S. Lee |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, February 2005, n. 1, v. 14 |
| Page(s): | 222-230 |
| DOI: | 10.1088/0964-1726/14/1/022 |
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10223350 - Published on:
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04/12/2018
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