Fabrication and electromechanical characterization of silicon on insulator based electrostatic micro-scanners
| Author(s): |
Dong Yan
Alyssa Apsel Amit Lal |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, August 2005, n. 4, v. 14 |
| Page(s): | 775-784 |
| DOI: | 10.1088/0964-1726/14/4/037 |
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10216738 - Published on:
04/12/2018 - Last updated on:
04/12/2018
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