Fabrication and characterization of a piezoelectric gallium nitride switch for optical MEMS applications
| Author(s): |
Prashanth Ramesh
Sriram Krishnamoorthy Siddharth Rajan Gregory N. Washington |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, September 2012, n. 9, v. 21 |
| Page(s): | 094003 |
| DOI: | 10.1088/0964-1726/21/9/094003 |
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