Excimer laser micromachining of TiN films from chromium and copper sacrificial layers
| Author(s): |
A. J. Dowling
M. K. Ghantasala J. P. Hayes E. C. Harvey E. D. Doyle |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, October 2002, n. 5, v. 11 |
| Page(s): | 715-721 |
| DOI: | 10.1088/0964-1726/11/5/314 |
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10215905 - Published on:
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04/12/2018
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