Evaluation of electromechanical properties and field concentrations near electrodes in piezoelectric thick films for MEMS mirrors by simulations and tests
Author(s): |
Fumio Narita
Yasuhide Shindo Koji Sato |
---|---|
Medium: | journal article |
Language(s): | English |
Published in: | Computers & Structures, June 2011, n. 11-12, v. 89 |
Page(s): | 1077-1085 |
DOI: | 10.1016/j.compstruc.2010.12.008 |
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10282918 - Published on:
05/01/2019 - Last updated on:
05/01/2019