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Evaluation of electromechanical properties and field concentrations near electrodes in piezoelectric thick films for MEMS mirrors by simulations and tests

Author(s):


Medium: journal article
Language(s): English
Published in: Computers & Structures, , n. 11-12, v. 89
Page(s): 1077-1085
DOI: 10.1016/j.compstruc.2010.12.008
Structurae cannot make the full text of this publication available at this time. The full text can be accessed through the publisher via the DOI: 10.1016/j.compstruc.2010.12.008.
  • About this
    data sheet
  • Reference-ID
    10282918
  • Published on:
    05/01/2019
  • Last updated on:
    05/01/2019
 
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