Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces
| Author(s): |
Radon Dhelika
Kenji Sawai Kunio Takahashi Wataru Takarada Takeshi Kikutani Shigeki Saito |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, September 2013, n. 9, v. 22 |
| Page(s): | 095010 |
| DOI: | 10.1088/0964-1726/22/9/095010 |
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10225126 - Published on:
04/12/2018 - Last updated on:
04/12/2018
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