Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor
| Author(s): |
David Vokoun
Lukas Kaderavek Jarmila Balogová Ladislav Fekete Michal Landa Jan Drahokoupil Jiří Němeček Ludek Heller |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, November 2019, n. 1, v. 29 |
| Page(s): | 015001 |
| DOI: | 10.1088/1361-665x/ab4e0c |
- About this
data sheet - Reference-ID
10376758 - Published on:
19/10/2019 - Last updated on:
21/11/2019
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