Development of a New Piezoelectric Galvanometer Scanner: Fabrication, Operation, and Measurements
Author(s): |
Ya-Chu Chiu
Chi-Ying Lin Chien-Yu Yen Yu-Hsi Huang |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, 14 May 2021, n. 7, v. 30 |
Page(s): | 074001 |
DOI: | 10.1088/1361-665x/ac028e |
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data sheet - Reference-ID
10608698 - Published on:
22/05/2021 - Last updated on:
08/06/2021