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Development of a New Piezoelectric Galvanometer Scanner: Fabrication, Operation, and Measurements

Author(s): ORCID


ORCID
Medium: journal article
Language(s): English
Published in: Smart Materials and Structures, , n. 7, v. 30
Page(s): 074001
DOI: 10.1088/1361-665x/ac028e
Structurae cannot make the full text of this publication available at this time. The full text can be accessed through the publisher via the DOI: 10.1088/1361-665x/ac028e.
  • About this
    data sheet
  • Reference-ID
    10608698
  • Published on:
    22/05/2021
  • Last updated on:
    08/06/2021
 
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