Design and vibration analysis of a piezoelectric-actuated MEMS scanning mirror and its application to laser projection
| Author(s): |
Chung-De Chen
Yao-Hui Lee Chien-Shien Yeh |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, December 2014, n. 12, v. 23 |
| Page(s): | 125007 |
| DOI: | 10.1088/0964-1726/23/12/125007 |
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10225677 - Published on:
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04/12/2018
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