Design and simulation of a MEMS Fabry-Perot accelerometer with ultra-low cross-axis sensitivity
Author(s): |
Minghui Zhao
Xueyong Wei Hongwu Bai HaiRong Wang |
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Medium: | journal article |
Language(s): | English |
Published in: | Smart Materials and Structures, 25 June 2020, n. 8, v. 29 |
Page(s): | 085029 |
DOI: | 10.1088/1361-665x/ab99d8 |
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data sheet - Reference-ID
10424781 - Published on:
11/06/2020 - Last updated on:
11/07/2020