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Design and simulation of a MEMS Fabry-Perot accelerometer with ultra-low cross-axis sensitivity

Author(s):



Medium: journal article
Language(s): English
Published in: Smart Materials and Structures, , n. 8, v. 29
Page(s): 085029
DOI: 10.1088/1361-665x/ab99d8
Structurae cannot make the full text of this publication available at this time. The full text can be accessed through the publisher via the DOI: 10.1088/1361-665x/ab99d8.
  • About this
    data sheet
  • Reference-ID
    10424781
  • Published on:
    11/06/2020
  • Last updated on:
    11/07/2020
 
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