Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner
| Author(s): |
Sachin P. Wadikhaye
Yuen Kuan Yong Bharath Bhikkaji S. O. Reza Moheimani |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, February 2014, n. 2, v. 23 |
| Page(s): | 025030 |
| DOI: | 10.1088/0964-1726/23/2/025030 |
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10225354 - Published on:
04/12/2018 - Last updated on:
04/12/2018
Structurae cooperates with
