Contactless four-terminal MEMS variable capacitor for capacitive adiabatic logic
| Author(s): |
A. Galisultanov
Y. Perrin H. Samaali H. Fanet P. Basset G. Pillonnet |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, August 2018, n. 8, v. 27 |
| Page(s): | 084001 |
| DOI: | 10.1088/1361-665x/aacac4 |
- About this
data sheet - Reference-ID
10214142 - Published on:
01/12/2018 - Last updated on:
01/12/2018
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