A compact 2-DOF piezo-driven positioning stage designed by using the parasitic motion of flexure hinge mechanism
| Author(s): |
Xuan Li
Xiangyuan Wang Wuxiang Sun Kuifeng Wang Zhixin Yang Tianwei Liang Hu Huang |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Smart Materials and Structures, November 2019, n. 1, v. 29 |
| Page(s): | 015022 |
| DOI: | 10.1088/1361-665x/ab547f |
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10377907 - Published on:
07/11/2019 - Last updated on:
05/12/2019
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