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Bulk-micromachined structures inside anisotropically etched cavities

Author(s):

Medium: journal article
Language(s): English
Published in: Smart Materials and Structures, , n. 6, v. 13
Page(s): 1424-1429
DOI: 10.1088/0964-1726/13/6/013
Structurae cannot make the full text of this publication available at this time. The full text can be accessed through the publisher via the DOI: 10.1088/0964-1726/13/6/013.
  • About this
    data sheet
  • Reference-ID
    10223298
  • Published on:
    04/12/2018
  • Last updated on:
    04/12/2018
 
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