Analysis of lattice deformation originated from residual stress on performance of aluminum nitride-based bulk acoustic wave resonators
| Author(s): |
Xiyu Gu
Yan Liu Yuanhang Qu 
Min Wei Xiang Chen Yaxin Wang Wenjuan Liu Bensong Pi Bo Woon Soon Yao Cai Shishang Guo
Chengliang Sun |
|---|---|
| Medium: | journal article |
| Language(s): | English |
| Published in: | Composite Structures, July 2024, v. 340 |
| Page(s): | 118203 |
| DOI: | 10.1016/j.compstruct.2024.118203 |
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10788904 - Published on:
20/06/2024 - Last updated on:
20/06/2024
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